”¼“±‘̐»‘¢—pƒKƒX Semiconductor Gases

PF3
Phosphorous Trifluoride
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•s”R« “Ő«
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—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm
PF1/4
‰E
‰E(0.35L)
SUS(D)
ˆ³—Í’²®Ší
Regulator
TUSƒVƒŠ[ƒY

PF3 R
99.99% Research
’@Žß ˆã–ò—pŠO“Å•¨ MSDS
MSDS (PF3)

PH3
Phosphine
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‰Â”R« “Ő«
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—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm
PF1/4
¶
‰E(0.35L)
SUS(D),B(D)
ˆ³—Í’²®Ší
Regulator
TUSƒVƒŠ[ƒY

PH3 S
99.9999% Special
PH3 R
99.999% Research
’@Žß •Ê–¼@…‘f‰»ƒŠƒ“@ˆã–ò—pŠO“Å•¨ SDS
SDS (PH3)

SF6
Sulfur Hexafluoride
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Cylinder Valve
22mm ‰E LG
B
ˆ³—Í’²®Ší
Regulator
TUSƒVƒŠ[ƒY
 
SF6 S
99.999% Special
SF6 R
99.99% Research
’@Žß
SDS
SDS (SF6)