”¼“±‘̐»‘¢—pƒKƒX Semiconductor Gases

SiF4
Silicon Tetrafluoride
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Cylinder Valve
22mm
PF1/4
‰E
‰E(0.35L)
SUS(D)
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Regulator
TUSƒVƒŠ[ƒY

SiF4 R
99.999% Research
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MSDS
MSDS (GeF4)

Si2H6
Disilane
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Cylinder Valve
22mm ¶
SUS(D),B(D)
ˆ³—Í’²®Ší
Regulator
TUSƒVƒŠ[ƒY
 
Si2H6 R
99.99% Research
’@Žß
MSDS
MSDS (GeF4)

SiH4
Monosilane
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‰Â”R« “Ő«
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—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm
PF1/4
¶
‰E(0.35L)
SUS(D),B(D)
ˆ³—Í’²®Ší
Regulator
TUSƒVƒŠ[ƒY

SiH4 R
99.999% Research
’@Žß •Ê–¼@…‘f‰»ƒPƒC‘fAƒVƒ‰ƒ“ SDS
SDS (SiH4)