(CH
3
)
3
SiH
Trimethylsilane
ƒgƒŠƒƒ`ƒ‹ƒVƒ‰ƒ“
@
—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm
PF1/4
¶
‰E(0.35L)
SUS(D)
ˆ³—Í’²®Ší
Regulator
TUSƒVƒŠ[ƒY
(CH
3
)
3
SiH
R
99.97%
Research
’@Žß
CH
3
SiH
3
Monomethylsilane
ƒ‚ƒmƒƒ`ƒ‹ƒVƒ‰ƒ“
@
—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm
PF1/4
¶
‰E(0.35L)
SUS(D)
ˆ³—Í’²®Ší
Regulator
TUSƒVƒŠ[ƒY
CH
3
SiH
3
R
99.97%
Research
’@Žß
GeF
4
Germanium Tetrafluoride
Žlƒtƒb‰»ƒQƒ‹ƒ}ƒjƒEƒ€
@
—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm
PF1/4
‰E
‰E(0.35L)
SUS(D)
GeF
4
R
99.99%
Research
’@Žß
•Ê–¼@Žlƒtƒb‰»ƒQƒ‹ƒ}ƒ“