PF
3
Phosphorous Trifluoride
ŽOƒtƒb‰»ƒŠƒ“
@
—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm
PF1/4
‰E
‰E(0.35L)
SUS(D)
ˆ³—Í’²®Ší
Regulator
TUSƒVƒŠ[ƒY
PF
3
R
99.99%
Research
’@Žß
ˆã–ò—pŠO“Å•¨
PH
3
Phosphine
ƒzƒXƒtƒBƒ“
@
—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm
PF1/4
¶
‰E(0.35L)
SUS(D),B(D)
ˆ³—Í’²®Ší
Regulator
TUSƒVƒŠ[ƒY
PH
3
S
99.9999%
Special
PH
3
R
99.999%
Research
’@Žß
•Ê–¼@…‘f‰»ƒŠƒ“@ˆã–ò—pŠO“Å•¨
SF
6
Sulfur Hexafluoride
˜Zƒtƒb‰»—°‰©
@
—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm
‰E LG
B
ˆ³—Í’²®Ší
Regulator
TUSƒVƒŠ[ƒY
SF
6
S
99.999%
Special
SF
6
R
99.99%
Research
’@Žß