针对离子注入装置、我社敬备以下主要气体。We supply the following gases for ion implantation:以下气体以外,特殊的材料、流体、固体也可根据要求配制。 We also supply special materials not listed below, and materials in liquid or solid forms upon request. 高千穂所制造离子注入装置用气体一览表
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容器种类 Cylinder Size |
气体的种类 Gas or Mixture |
充填压力 Filling Pressure |
容量 Contents |
容器阀门形状 Valve Type |
出口 尺寸 Outlet Size |
---|---|---|---|---|---|
0.35L | AsH3 15%+H2 | 4.91MPa | 17.5L | 隔膜阀 直通式(SUS) Diaphragm Valve Straight Type |
1/4PF (阳) 19旋 19h male |
PH3 15%+H2 | 4.91MPa | 17.5L | |||
PH3 15%+He | 4.91MPa | 17.5L | |||
BF3 | 7.36MPa | 100g | |||
SiF4 | 4.91MPa | 100g | |||
Ar | 4.91MPa | 17.5L | |||
1L | AsH3 15%+H2 | 4.91MPa | 50L | 隔膜阀 角式(SUS) Diaphragm Valve Angle Type |
22mm (阳) 左14旋 14h left male 22mm 14 (阳) 右14旋 14h right male |
PH3 15%+H2 | 4.91MPa | 50L | |||
BF3 | 5.40MPa | 200g | |||
11BF3 | 2.95MPa | 100g | |||
Ar | 4.91MPa | 50L | 杆式阀 角式 Spindle Valve Angle Type |
||
3.4L | AsH3 15%+H2 | 4.91MPa | 170L | 隔膜阀 直通式(B) Diaphragm Valve Angle Type |
22mm (阳) 左14旋 14h left male 22mm (阳) 右14旋 14h right male |
PH3 15%+H2 | 4.91MPa | 170L | |||
BF3 | 2.75MPa | 300g | 隔膜阀 角式(SUS Diaphragm Valve Angle Type |
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11BF3 | 1.97MPa | 200g | |||
Ar | 4.91MPa | 170L | 杆式阀 (内蔵过滤器) Spindle Valve Angle Type |
22mm (阳) 右14旋 14h right male |
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其他的 气体材料 Others |
BCL3, Xe, Ne, O2, PF3, N2, CO2, B2H6 15%+H2, GeH4, AsH3, PH3 | ||||
SDS® | AsH3 100% | 21℃ 650±50Torr |
4×440g 7×88g |
隔膜式 (内蔵过滤器) Diaphragm (Internal Filter) |
(阳) 1/2"VCR 1/2"VCR male |
PH3 100% | 4×170g 7×30g |
||||
11BF3 100% | 4×130g 7×26g |
(阳)1/4"VCR 1/4"VCR male |
注释) SDS 4X=2.25L SDS 7X=0.44L容器。
Note) SDS 4X = 2.25L, SDS 7X = 0.44L cylinder.
SDS是MATHESON TRI・GAS和Advanced Technology Materials, Inc.的注册商标。
SDS is a registered trade mark of MATHESON TRI・GAS and Advanced Technology Materials, Inc.
以上的气体以外,也请询问。注释) SDS 4X=2.25L SDS 7X=0.44L容器。
Please inquire about other gases not listed above
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