所谓混合气体、是指以各种高純度气体为原料混合而成的气体。
*原則上充填圧力为11.8Mpa。根据气体的种类・浓度的不同, 充填圧力有可能比11.8Mpa更低。
*根据气体的种类的不同, 製造可能的浓度焕范围而不同。
(Table-1)表示: 2种成分混合气体的製造可否表
Mixture gases listed here are manufactured by blending high purity gases.
* Standard fill pressure is 11.8MPa. However, maximum fill pressure may be lower depending on gases and concentrations.
* The range of available concentration is different by gases.
The product availability of 2 kinds of mixture gases is listed below as Table-1.
Table-1
化学式
Chemical Formula |
组分名
|
Component |
平衡气 Balance gas |
N2 |
He |
Ar |
H2 |
Air |
Ar |
氩 |
Argon |
|
|
- |
|
|
AsH3 |
砷化氢 |
Arsine |
|
|
|
|
|
B2H6 |
乙硼烷 |
Diborane |
|
|
|
|
|
BCl3 |
三氯化硼 |
Boron trichloride |
|
|
|
|
|
BF3 |
(三)氟化硼 |
Boron trifluoride |
|
|
|
|
|
Cl2 |
氯气 |
Chlorine |
|
|
|
|
|
CO |
一氧化碳 |
Carbon monoxide |
|
|
|
|
|
CO2 |
二氧化碳 |
Carbon dioxide |
|
|
|
|
|
COS |
氧硫化碳 |
Carbonyl sulfide |
|
|
|
|
|
D2 |
氘 |
Deuterium |
|
|
|
|
|
F2 |
氟素 |
Fluorine |
|
|
|
|
|
GeH4 |
锗烷 |
Germane |
|
|
|
|
|
H2 |
氢气 |
Hydrogen |
|
|
|
- |
|
H2S |
硫化氢 |
Hydrogen sulfide |
|
|
|
|
|
H2Se |
硒化氢 |
Hydrogen selenide |
|
|
|
|
|
HBr |
溴化氢 |
Hydrogen bromide |
|
|
|
|
|
HCl |
氯化氢 |
Hydrogen chloride |
|
|
|
|
|
He |
氦气 |
Helium |
|
- |
|
|
|
Kr |
氪 |
Krypton |
|
|
|
|
|
N2 |
氮气 |
Nitrogen |
- |
|
|
|
- |
N2O |
氧化亚氮 |
Nitrous oxide |
|
|
|
|
|
Ne |
三氟化氮 |
Neon |
|
|
|
|
|
NF3 |
三氟化氮 |
Nitrogen trifluoride |
|
|
|
|
|
NH3 |
氨气 |
Ammonia |
|
|
|
|
|
NO |
一氧化氮 |
Nitric oxide |
|
|
|
|
|
NO2 |
二氧化氮 |
Nitrogen dioxide |
|
|
|
|
|
O2 |
氧气 |
Oxygen |
|
|
|
|
- |
PH3 |
磷化氢 |
Phosphine |
|
|
|
|
|
SF6 |
硫磺六氟化合物 |
Sulfur hexafluoride |
|
|
|
|
|
Si2H6 |
乙硅烷 |
Disilane |
|
|
|
|
|
SiF4 |
四氟化硅 |
Silicon tetrafluoride |
|
|
|
|
|
SiH2Cl2 |
二氯硅烷 |
Dichlorosilane |
|
|
|
|
|
SiH4 |
硅烷 |
silane |
|
|
|
|
|
SO2 |
二氧化硫 |
Sulfur dioxide |
|
|
|
|
|
Xe |
氙 |
Xenon |
|
|
|
|
|
(CH3)2Zn |
甲基锌 |
Dimethylzinc |
|
|
|
|
|
CH3SiH3 |
甲基矽甲烷 |
Monomethylsilane |
|
|
|
|
|
(CH3)3SiH |
三甲基硅烷 |
Trimethylsilane |
|
|
|
|
|
CH4 |
甲烷 |
Methane |
|
|
|
|
|
CH3Br |
溴甲烷 |
Methyl bromide |
|
|
|
|
|
CH2Br2 |
(二)溴甲烷 |
Dibromomethane |
|
|
|
|
|
CH3OH |
甲醇 |
Methyl alcohol |
|
|
|
|
|
CH3SH |
甲硫醇 |
Methyl mercaptan |
|
|
|
|
|
C2H6 |
乙烷 |
Ethane |
|
|
|
|
|
C2H4 |
乙烯 |
Ethylene |
|
|
|
|
|
C2H2 |
乙炔 |
Acetylene |
|
|
|
|
|
C2H4O |
环氧乙烷 |
Ethylene oxide |
|
|
|
|
|
C2H5OH |
乙醇 |
Ehtyl alcohol |
|
|
|
|
|
CH2CHCl |
氯乙烯 |
Vinyl chloride |
|
|
|
|
|
(CH3)2O |
二甲醚 |
Dimethyl ether |
|
|
|
|
|
(CH3)2S |
二甲基硫醚 |
Dimethyl sulfide |
|
|
|
|
|
C3H8 |
丙烷 |
Propane |
|
|
|
|
|
C3H6 |
丙烯 |
Propylene |
|
|
|
|
|
n-C4H10 |
丁烷 |
Butane |
|
|
|
|
|
i-C4H10 |
异丁烷 |
Isobutane |
|
|
|
|
|
1-C4H8 |
1-丁烯 |
1-Butene |
|
|
|
|
|
i-C4H8 |
异丁烯 |
2-Methylpropene |
|
|
|
|
|
1,3-C4H6 |
1,3-丁二烯 |
1,3-Butadiene |
|
|
|
|
|
n-C5H12 |
戊烷 |
Pentane |
|
|
|
|
|
i-C5H12 |
异戊烷 |
Isopentane |
|
|
|
|
|
neo-C5H12 |
二甲基丙烷 |
Neopentane |
|
|
|
|
|
C6H6 |
苯 |
Benzene |
|
|
|
|
|
n-C6H14 |
己烷 |
Hexane |
|
|
|
|
|
C7H8 |
甲苯 |
Toluene |
|
|
|
|
|
m-C6H4(CH3)2 |
间二甲苯 |
m-Xylene |
|
|
|
|
|
o-C6H4(CH3)2 |
邻间二甲苯 |
o-Xylene |
|
|
|
|
|
p-C6H4(CH3)2 |
对二甲苯 |
p-Xylene |
|
|
|
|
|
CF4 |
四氟化碳 |
Tetrafluoromethane |
|
|
|
|
|
CHCl2F |
二氧氟带甲烷 |
Dichlorofluoromethane |
|
|
|
|
|
CHClF2 |
一氯二氟甲烷 (氟里昂22) |
Chlorodifluoromethane |
|
|
|
|
|
CHF3 |
三氟甲烷 |
Trifluoromethane |
|
|
|
|
|
CH2F2 |
二氟甲烷 |
Difluoromethane |
|
|
|
|
|
C2F6 |
六氟乙烷 |
Hexafluoroethane |
|
|
|
|
|
C2HF5 |
五氟乙烷 |
Pentafluoroethane |
|
|
|
|
|
CH2FCF3 |
1,1,1,2-四氟乙烷 |
1,1,1,2-Tetrafluoroethane |
|
|
|
|
|
CClF2CH3 |
1,1-二氟-1-氯乙烷 |
1-Chloro-1,1-difluoroethane |
|
|
|
|
|
CH3CF3 |
1,1,1-三氟乙烷 |
1,1,1-Trifluoroethane |
|
|
|
|
|
C3F8 |
八氟丙烷 |
Perfluoropropane |
|
|
|
|
|
:製造可能。
:製造可能,但是,因为「可燃性气体+支燃性气体」,混合浓度有限制。
:无法製造。
关于这里没有记载的气体,敬请咨询。
: Available.
: Available, but mixture concentration is limited because it is a mixture of flammable and oxidizer gases.
: Unavailable.
Please inquire us about gases not listed here.
- 容器阀门
- 关于混合气体的浓度・充填圧力・容器尺寸・阀门种类,敬请咨询。
- 圧力调整器
- 关于圧力调整器 请参照产品项目。
- 其他事项
- 其他的混合气体,也可以根据要求配制,敬请咨询。
- Cylinder Valves
- Please inquire us about concentration, fill pressure, cylinder and valve size of mixtures.
- Regulator
- Please see Regulator(Gases related apparatus).
- Other Special Specifications
- Please inquire us for other gases and specifications. We try to meet your specific requirements as much as possible.
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